We did for a position we recently filled on my team. It was interesting, and I do feel that we got a perspective that would have been missed over the phone.
She came in person for her first interview (I wasn't in that one), and then did a skype call with a group for her second. Part was interview, part was a scenario where we asked her to present xyz material since a major part of the job is presentational speaking. That's why we did the skype part. I do think it was nice for the other part too though.
I do know, from talking to her afterwards, that it was nerve wracking for her. She said she tested out using the webcam in several rooms before she found one she was comfortable with us seeing in the background.